Optical MEMS Platforms
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2D MEMS Stage integrated with a microlens array (fabricated at IMT) |
Movable micro-optical components integrated with micro-mechanical systems promise a great potential for a wide range of applications, such as optical scanning, telecommunications and biological inspection. This Work Package focuses on the development of passive micro-optical bench and 2D moving platform to be used by several partners for various micro-optical applications, including a microlens array based endoscopic imaging system, scanning confocal microscope, and a micro-interferometer. The SEM image of the platform and the photograph of a microlens array placed on the platform can be seen in the figure below. |
Contact person
Urey Hakan
