Abteilung Mikrooptik Forschungszentrum Karlruhe
| Institute: |
Institut fur Mikrostrukturtechnik |
| Address: |
Herrmann-von-Helmholtz-Platz 1
76344
Eggenstein-Leopoldshafen
Germany |
| Website: |
http://www.fzk.de/imt/ |
| Contact person |
Mohr Jürgen |
| Presentation: |
FZK.pdf (1.47 MB) |
Description
Forschungszentrum Karlsruhe is one of the biggest science and engineering research institutions in Europe funded jointly by the Federal Republic of Germany and the State of Baden-Württemberg with about 3200 employees and a budget of about 250 Mio. €. As it concentrates on such technical fields, where sophisticated and complex scientific fundamental research is the prerequisite for maximum innovation progress it has strong activities in Microsystem Technology. The focus is on non silicon materials processing and application oriented development in bio- and micro fluidics, micro process engineering and micro optics. In micro optics and related process development about 50 people are working covering the entire development chain from materials tailoring, simulation, prototyping, mastering, characterization, packaging, reliability issues and small series fabrication. The focus is on polymer micro optics fabricated by lithography and laser processing as well as by micro replication techniques. Apart from the development and optimization of high aspect ratio fabrication techniques (e.g. LIGA technique) micro optical systems are developed with a view of mid term industrial applications in the sensor and telecommunication field.
